Central Slurry Supply System
We provide large-scale central supply system, which is capable of mixing slurry precisely according to process demand and transport to CMP process tool safely. Our central supply system is perfect for supplying slurry in mass production area.
Advantages
- Flowing Fluid De-bubble
- Optimum plumbing layout of slurry flow path
- Fluid jet device to enhanceslurry uniformity
- Wet N2 atomizer to maintain Drums humidity
- Pressure / flow / temperature real-time monitor
- Mixed slurry resolution monitor / control by pH & SG meters ( with optional titration or conductivity meter)
- Automatic safety and security system
- Mixing Ratio controlled by Load Cell/Flow meter
- Load cell/Level sensor on tank, provides additional guarantee of stable supply
- RedundantCentrifugal Pump / Pneumatic Driven Pump design provides stable and continuous slurry circulation and supply
Certification：SEMI S2
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