Local Slurry Supply System
We provide medium-scale supply system, which is capable of mixing slurry precisely according to process demand and transport to CMP process tool safely. Our local supply system is perfect for applying to new process or process without mass production.
Advantages
- Dual pail and mixing/supply tank to supply slurry Continuously
- Independent load cell to ensure highly accurate mixing of H2O2.
- Two mixing / supply modes to increase system up-time
- Easy and quick adjustable recipe setting to meet varied slurry application.
- Load cell/Level sensor on tank, provides additional guarantee of stable supply
- Fully automatic flush feature provides tank and loop cleaning to reducemaintenance labor costs.
- Filter Auto Flush
- AIC real-time quality inspection
Safety Regulation：Meet all SEMI S2 requirements
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