We provide Slurry Supply Systems on a turn-key basis and ensure ahigh-precise of slurry mixing and dosage control mechanisms. Appropriate measuring approaches are used for different kinds of slurry.
Semiconductor process
We provide large-scale central supply system, which is capable of mixing slurry precisely according to process demand and transport to CMP process tool safely. Our central supply system is perfect for supplying slurry in mass production area.
LEARN MOREWe provide medium-scale supply system, which is capable of mixing slurry precisely according to process demand and transport to CMP process tool safely. Our local supply system is perfect for applying to new process or process without mass production.
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