Gas Mixer / Gas Blender

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Advantages:
  • Precision mixing ratio ( design with in-line gas analyzer and digital mass flow controller)
  • Superior performance (purity / concentration)
  • Major cost reduction (material / operation)
  • Continuous operation capability and no contamination
  • All components are standard and commercially available
Certification:
  • SEMI S2
Specifications:
  • H2/ N2
  • He / N2
  • O2 / He

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