Gas Cabinet / Rack

          rack.jpg

Advantages:
  • Vacuum isolated manifold design to prevent process contamination and damage
  • Process manual outlet valve monitoring
  • All components are standard and commercially available
  • Pressure and weight trend chart
Certification:
  • SEMI S2
Specifications:
  • 2 Cylinder: 2-process
  • 3 Cylinder: 2-process, 1-purge

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