Chemical Dispense Unit
Transporting chemicals to process tool precise, safely, and meeting process demand.
Advantages
- Water Hammer pipe conveyor
- Safety valve on tank
- Sump Pump equipped
- Supply through pump or pressure provided by N2 pressure vessel
- Redundancydesign to enhance machine uptime
- Multi-Stage of level monitoring in tank
- Automatic security system
- Multi-Choice of chemical source ( CCB/Drum/Diluted/Blended)
Certifications: SEMI S2
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